1200 ℃ slider-type dual-zone PECVD system

Model

TOB-DSP-1200℃

-PECVD-I

TOB-DSP-1200℃

-PECVD-II

TOB-DSP-1200℃

-PECVD-III

TOB-DSP-1200℃

-PECVD-IV

Power

3KW

3KW

4KW

4KW

Furnace tube size(mm)

Dia 60(OD) X1800mm

Dia 80(OD) X1800mm

Dia 100(OD) X1800mm

Dia 120(OD) X1800mm

Dimension

1800X410X610

1800X410X610

1800X460X660

1800X460X660

Power supply voltage

220V

Phase number

Single-phase

Control mode

Yudian temperature control

30 sections can only use PID temperature regulation.

FP93 temperature control (from Japan)

(Replace imported instruments, for an additional fee)

1,40 section program temperature control can be divided into 4,2,1 group program, if the program is divided into four groups, each program segment 10,

2,6 group PID control, low, medium and high temperature can each with a set of PID, such that each segment is capable of controlling the temperature is very accurate.

Temperature control mode

Intelligent PID

Burnout protection and display

Yes

Over-temperature protection

Yes

Overcurrent protection

Yes

Control accuracy

+/- 1 ℃

Trigger

Phase-shift trigger

SCR

106 / 16E Germany Simon Kang

The 1.2 temperature zone max temperature

1200 ℃

The 1.2 temperature zone

Rated temperature

1150 ℃

Heating rate

≤30 ℃ / Min (Available upon request modification)

Recommended heating rate

≤15 ℃ / Min

Thermocouple Type

K type

The 1.2 temperature zone heating length

205mm

Surrounding surface temperature

≤45℃

Plasma RF Power

Power output range

0-500W

Maximum reflected power

10W

Signal frequency

13.56MHZ ± 0.005%

Noise

<30 dB

Air cooling

cooling method

Input Power

208-240V 50 / 60HZ

GX supply system main parameters

Standard range

Proton flow controller 5,10,20,30,50,100,200,300,500SCCM, 1,2,3,5,10SLM

 (you can choose any scale)

Accuracy

± 1.5%

Pressure drop

<0.01MPa

Repeatability

± 0.2% F.S

Max

Operating pressure

3MP

VS-0.1 exhaust system

power supply

220V / 380V 380W

Pumping rate

2L / S

Resistance vacuum gauge

ZDR-I

Vacuum measurement range

0.1-10 5 Pa

Vacuum pump

VRD-8

Corrugated pipe

KF25X1000mm

Vacuum system

10 -1Pa