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1200 ℃ slider-type dual-zone PECVD system

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1200 ℃ slider-type dual-zone PECVD system

item no.:
TOB-DSP-1200℃-PECVD
order(moq):
1set
Payment:
L/C,T/T,Western Union, Paypal
product origin:
China
shipping port:
XIAMEN
Lead Time:
7days

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Product Detail

1200 ℃ slider-type dual-zone PECVD system

SPECIFICATIONS

Model	TOB-DSP-1200℃ -PECVD-I	TOB-DSP-1200℃ -PECVD-II		TOB-DSP-1200℃ -PECVD-III	TOB-DSP-1200℃ -PECVD-IV
Power	3KW	3KW		4KW	4KW
Furnace tube size(mm)	Dia 60(OD) X1800mm	Dia 80(OD) X1800mm		Dia 100(OD) X1800mm	Dia 120(OD) X1800mm
Dimension	1800X410X610	1800X410X610		1800X460X660	1800X460X660
Power supply voltage	220V
Phase number	Single-phase
Control mode	Yudian temperature control 30 sections can only use PID temperature regulation. FP93 temperature control (from Japan) (Replace imported instruments, for an additional fee) 1,40 section program temperature control can be divided into 4,2,1 group program, if the program is divided into four groups, each program segment 10, 2,6 group PID control, low, medium and high temperature can each with a set of PID, such that each segment is capable of controlling the temperature is very accurate.
Temperature control mode	Intelligent PID
Burnout protection and display	Yes
Over-temperature protection	Yes
Overcurrent protection	Yes
Control accuracy	+/- 1 ℃
Trigger	Phase-shift trigger
SCR	106 / 16E Germany Simon Kang
The 1.2 temperature zone max temperature	1200 ℃
The 1.2 temperature zone Rated temperature	1150 ℃
Heating rate	≤30 ℃ / Min (Available upon request modification)
Recommended heating rate	≤15 ℃ / Min
Thermocouple Type	K type
The 1.2 temperature zone heating length	205mm
Surrounding surface temperature	≤45℃
Plasma RF Power	Power output range		0-500W
	Maximum reflected power		10W
	Signal frequency		13.56MHZ ± 0.005%
	Noise		<30 dB
	Air cooling		cooling method
	Input Power		208-240V 50 / 60HZ
GX supply system main parameters	Standard range		Proton flow controller 5,10,20,30,50,100,200,300,500SCCM, 1,2,3,5,10SLM (you can choose any scale)
	Accuracy		± 1.5%
	Pressure drop		<0.01MPa
	Repeatability		± 0.2% F.S
	Max Operating pressure		3MP
VS-0.1 exhaust system	power supply		220V / 380V 380W
	Pumping rate		2L / S
	Resistance vacuum gauge		ZDR-I
	Vacuum measurement range		0.1-10 5 Pa
	Vacuum pump		VRD-8
	Corrugated pipe		KF25X1000mm
	Vacuum system		10 -1Pa

Email : tob.amy@tobmachine.com

Skype : amywangbest86

Whatsapp/Phone number : +86 181 2071 5609

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